Design and Analysis of Curved Electrode Configurations for Enhanced Sensitivity in 1-Axis MEMS Accelerometers

Fuente: arXiv

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Bibliographic Details
Main Authors:	Ashok, Adhinarayan Naembin, Ganesan, Adarsh
Format:	Preprint
Published:	2025
Subjects:	Systems and Control
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2508.12249