Structural, optical, and dielectric properties of Cr-doped ZnO films via DC magnetron sputtering

Fuente: arXiv
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Main Authors: Guo, Men, Orr, Gilad, Ishai, Paul Ben, Zhao, Xia, Glasser, Shlomo
Format: Preprint
Published: 2025
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_version_ 1866916905120432128
author Guo, Men
Orr, Gilad
Ishai, Paul Ben
Zhao, Xia
Glasser, Shlomo
author_facet Guo, Men
Orr, Gilad
Ishai, Paul Ben
Zhao, Xia
Glasser, Shlomo
contents Cr-doped ZnO films were fabricated by a new but feasible method, that is, annealing Cr-Zn layers deposited via DC magnetron sputtering in air. Microstructures of the films were investigated using X-ray diffraction, scanning electron microscopy, and atomic force microscopy, intrinsic point defects were identified via photoluminescence spectroscopy, and optical and dielectric properties were analyzed using a UV-vis spectrophotometer and dielectric spectrometer, respectively. It was found that the average grain sizes decrease (56.34 - 39.50 nm), the band gap increases (from 3.18 to 3.23 eV), and the transmittance (at 600 nm) decreases (from 91% to 83%) with increasing Cr. Two activation energies of conduction increase after doping Cr, indicating enhanced temperature stability. At optimal Cr levels, ZnO films exhibit high transmittance and conductivity, exhibiting potential for transparent electrode development. This method can be extended to other doped ZnO films, such as Al-doped ZnO transparent electrodes, to achieve simultaneous improvements in transmittance, conductivity, and stability for flexible and wearable applications.
format Preprint
id arxiv_https___arxiv_org_abs_2508_12642
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Structural, optical, and dielectric properties of Cr-doped ZnO films via DC magnetron sputtering
Guo, Men
Orr, Gilad
Ishai, Paul Ben
Zhao, Xia
Glasser, Shlomo
Materials Science
Applied Physics
Cr-doped ZnO films were fabricated by a new but feasible method, that is, annealing Cr-Zn layers deposited via DC magnetron sputtering in air. Microstructures of the films were investigated using X-ray diffraction, scanning electron microscopy, and atomic force microscopy, intrinsic point defects were identified via photoluminescence spectroscopy, and optical and dielectric properties were analyzed using a UV-vis spectrophotometer and dielectric spectrometer, respectively. It was found that the average grain sizes decrease (56.34 - 39.50 nm), the band gap increases (from 3.18 to 3.23 eV), and the transmittance (at 600 nm) decreases (from 91% to 83%) with increasing Cr. Two activation energies of conduction increase after doping Cr, indicating enhanced temperature stability. At optimal Cr levels, ZnO films exhibit high transmittance and conductivity, exhibiting potential for transparent electrode development. This method can be extended to other doped ZnO films, such as Al-doped ZnO transparent electrodes, to achieve simultaneous improvements in transmittance, conductivity, and stability for flexible and wearable applications.
title Structural, optical, and dielectric properties of Cr-doped ZnO films via DC magnetron sputtering
topic Materials Science
Applied Physics
url https://arxiv.org/abs/2508.12642