Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges

Fuente: arXiv
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Main Authors: Gautam, Deepak, Sharma, Sarveshwar, Kaganovich, Igor, Paradkar, Bhooshan
Format: Preprint
Published: 2025
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author Gautam, Deepak
Sharma, Sarveshwar
Kaganovich, Igor
Paradkar, Bhooshan
author_facet Gautam, Deepak
Sharma, Sarveshwar
Kaganovich, Igor
Paradkar, Bhooshan
contents The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by $1 \le f_{ce}/f_{rf} < 2$, where $f_{ce}$ and $f_{rf}$ denote the electron cyclotron frequency and the applied radio-frequency (RF), respectively. A distinctive feature of this regime is the excitation of electron Bernstein waves (EBWs) that propagate into the bulk plasma. As the applied magnetic field increases, notable changes in the discharge characteristics occur, with EBWs observed to propagate along the plasma density gradient inside the bulk. The underlying physics of CCP operation in this regime is analyzed in detail using particle-in-cell Monte Carlo collisions (PIC-MCC) simulations.
format Preprint
id arxiv_https___arxiv_org_abs_2508_16208
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges
Gautam, Deepak
Sharma, Sarveshwar
Kaganovich, Igor
Paradkar, Bhooshan
Plasma Physics
The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by $1 \le f_{ce}/f_{rf} < 2$, where $f_{ce}$ and $f_{rf}$ denote the electron cyclotron frequency and the applied radio-frequency (RF), respectively. A distinctive feature of this regime is the excitation of electron Bernstein waves (EBWs) that propagate into the bulk plasma. As the applied magnetic field increases, notable changes in the discharge characteristics occur, with EBWs observed to propagate along the plasma density gradient inside the bulk. The underlying physics of CCP operation in this regime is analyzed in detail using particle-in-cell Monte Carlo collisions (PIC-MCC) simulations.
title Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges
topic Plasma Physics
url https://arxiv.org/abs/2508.16208