Design Optimized CMOS Compatible Hybrid Silicon MIM Waveguide Cavity for Label Free Sensing
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arXiv
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| Format: | Preprint |
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2025
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| _version_ | 1866908503373774848 |
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| author | Khalilian, Alireza Rad, Hima Nikafshan |
| author_facet | Khalilian, Alireza Rad, Hima Nikafshan |
| contents | We numerically design a hybrid plasmonic dielectric refractive index biosensor comprising ametal insulator metal (MIM) bus waveguide evanescently coupled to a silicon core resonator. The geometry is optimized with a genetic algorithm (GA) using Ansys Lumerical FDTD simulations, targeting maximal sensitivity and figure of merit while minimizing the resonance linewidth. The optimized device achieves a sensitivity of 1276 nm/RIU, a full width at half maximum (FWHM) of 11.89nm, a quality factor of 221, and a figure of merit of 107 RIU1 (defined as S/FWHM). These results demonstrate precise discrimination of small refractive index variations and support the sensors applicability to label free biochemical and medical diagnostics. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2508_18291 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Design Optimized CMOS Compatible Hybrid Silicon MIM Waveguide Cavity for Label Free Sensing Khalilian, Alireza Rad, Hima Nikafshan Instrumentation and Detectors Optics We numerically design a hybrid plasmonic dielectric refractive index biosensor comprising ametal insulator metal (MIM) bus waveguide evanescently coupled to a silicon core resonator. The geometry is optimized with a genetic algorithm (GA) using Ansys Lumerical FDTD simulations, targeting maximal sensitivity and figure of merit while minimizing the resonance linewidth. The optimized device achieves a sensitivity of 1276 nm/RIU, a full width at half maximum (FWHM) of 11.89nm, a quality factor of 221, and a figure of merit of 107 RIU1 (defined as S/FWHM). These results demonstrate precise discrimination of small refractive index variations and support the sensors applicability to label free biochemical and medical diagnostics. |
| title | Design Optimized CMOS Compatible Hybrid Silicon MIM Waveguide Cavity for Label Free Sensing |
| topic | Instrumentation and Detectors Optics |
| url | https://arxiv.org/abs/2508.18291 |