MEMS chip-based single proof-mass triaxial fiber-optic accelerometer with ultra-low noise level
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arXiv
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| Natura: | Preprint |
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2025
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| _version_ | 1866915464285782016 |
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| author | Liu, Chaoyue Lu, Ping |
| author_facet | Liu, Chaoyue Lu, Ping |
| contents | High-precision triaxial acceleration detection holds critical applications in seismic wave detection, geological resource exploration, and aerospace systems. Fabry-Perot (FP) optical sensors have gained widespread adoption in these domains due to their compact footprint and immunity to electromagnetic interference. Nevertheless, conventional three-axis measurements predominantly rely on assembling multiple single-axis transducers, introducing limitations such as increased device volume and misalignment errors. In this paper, we demonstrate a MEMS based monolithically integrated triaxial optical accelerometer that integrates a compact size with minimal noise and low crosstalk. The triaxial sensing structure employs a shared proof mass, achieving significant miniaturization compared to conventional multi-chip assembled triaxial optical accelerometers. In-plane sensing is realized through folded spring beams, while out-of-plane detection utilizes U-shaped suspension beams with widened central segments to suppress cross-axis sensitivity and enhance mechanical responsivity. Experimental results demonstrate that an operational bandwidth of 1\sim35 Hz, a minimum detectable acceleration of 4.12 ng/\sqrt{Hz}, and crosstalk below 0.023\%. The compact sensor footprint measures 16 mm \times 16 mm \times 0.5 mm. This optical accelerometer achieves nano-g resolution in the three-axis direction, demonstrating strong potential for applications in seismic wave detection and other precision vibration monitoring fields. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2508_18981 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | MEMS chip-based single proof-mass triaxial fiber-optic accelerometer with ultra-low noise level Liu, Chaoyue Lu, Ping Optics Applied Physics High-precision triaxial acceleration detection holds critical applications in seismic wave detection, geological resource exploration, and aerospace systems. Fabry-Perot (FP) optical sensors have gained widespread adoption in these domains due to their compact footprint and immunity to electromagnetic interference. Nevertheless, conventional three-axis measurements predominantly rely on assembling multiple single-axis transducers, introducing limitations such as increased device volume and misalignment errors. In this paper, we demonstrate a MEMS based monolithically integrated triaxial optical accelerometer that integrates a compact size with minimal noise and low crosstalk. The triaxial sensing structure employs a shared proof mass, achieving significant miniaturization compared to conventional multi-chip assembled triaxial optical accelerometers. In-plane sensing is realized through folded spring beams, while out-of-plane detection utilizes U-shaped suspension beams with widened central segments to suppress cross-axis sensitivity and enhance mechanical responsivity. Experimental results demonstrate that an operational bandwidth of 1\sim35 Hz, a minimum detectable acceleration of 4.12 ng/\sqrt{Hz}, and crosstalk below 0.023\%. The compact sensor footprint measures 16 mm \times 16 mm \times 0.5 mm. This optical accelerometer achieves nano-g resolution in the three-axis direction, demonstrating strong potential for applications in seismic wave detection and other precision vibration monitoring fields. |
| title | MEMS chip-based single proof-mass triaxial fiber-optic accelerometer with ultra-low noise level |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2508.18981 |