A non-invasive dry-transfer method for fabricating mesoscopic devices on sensitive materials

Fuente: arXiv
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Auteurs principaux: Jia, Zhongmou, Ma, Yiwen, Xu, Zhongchen, Yang, Xue, Xiao, Jianfei, He, Jiezhong, Shi, Yunteng, Zhang, Zhiyuan, Wang, Duolin, Zhou, Sicheng, Tong, Bingbing, Li, Peiling, Dou, Ziwei, Song, Xiaohui, Liu, Guangtong, Shen, Jie, Lyu, Zhaozheng, Shi, Youguo, Hu, Jiangping, Lu, Li, Qu, Fanming
Format: Preprint
Publié: 2025
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author Jia, Zhongmou
Ma, Yiwen
Xu, Zhongchen
Yang, Xue
Xiao, Jianfei
He, Jiezhong
Shi, Yunteng
Zhang, Zhiyuan
Wang, Duolin
Zhou, Sicheng
Tong, Bingbing
Li, Peiling
Dou, Ziwei
Song, Xiaohui
Liu, Guangtong
Shen, Jie
Lyu, Zhaozheng
Shi, Youguo
Hu, Jiangping
Lu, Li
Qu, Fanming
author_facet Jia, Zhongmou
Ma, Yiwen
Xu, Zhongchen
Yang, Xue
Xiao, Jianfei
He, Jiezhong
Shi, Yunteng
Zhang, Zhiyuan
Wang, Duolin
Zhou, Sicheng
Tong, Bingbing
Li, Peiling
Dou, Ziwei
Song, Xiaohui
Liu, Guangtong
Shen, Jie
Lyu, Zhaozheng
Shi, Youguo
Hu, Jiangping
Lu, Li
Qu, Fanming
contents Many materials with novel or exotic properties are highly sensitive to environmental factors such as air, solvents, and heat, which complicates device fabrication and limits their potential applications. Here, we present a universal submicron fabrication method for mesoscopic devices using a dry-transfer technique, tailored specifically for sensitive materials. This approach utilizes PMMA masks, combined with a water-dissoluble coating as a sacrificial layer, to ensure that sensitive materials are processed without exposure to harmful environmental conditions. The entire fabrication process is carried out in a glove box, employing dry techniques that avoid air, solvents, and heat exposure, culminating in an encapsulation step. We demonstrate the utility of this method by fabricating and characterizing K2Cr3As3 and WTe2 devices, a one- and two-dimensional material, respectively. The results show that our technique preserves the integrity of the materials, provides excellent contact interfaces, and is broadly applicable to a range of sensitive materials.
format Preprint
id arxiv_https___arxiv_org_abs_2508_19550
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle A non-invasive dry-transfer method for fabricating mesoscopic devices on sensitive materials
Jia, Zhongmou
Ma, Yiwen
Xu, Zhongchen
Yang, Xue
Xiao, Jianfei
He, Jiezhong
Shi, Yunteng
Zhang, Zhiyuan
Wang, Duolin
Zhou, Sicheng
Tong, Bingbing
Li, Peiling
Dou, Ziwei
Song, Xiaohui
Liu, Guangtong
Shen, Jie
Lyu, Zhaozheng
Shi, Youguo
Hu, Jiangping
Lu, Li
Qu, Fanming
Mesoscale and Nanoscale Physics
Many materials with novel or exotic properties are highly sensitive to environmental factors such as air, solvents, and heat, which complicates device fabrication and limits their potential applications. Here, we present a universal submicron fabrication method for mesoscopic devices using a dry-transfer technique, tailored specifically for sensitive materials. This approach utilizes PMMA masks, combined with a water-dissoluble coating as a sacrificial layer, to ensure that sensitive materials are processed without exposure to harmful environmental conditions. The entire fabrication process is carried out in a glove box, employing dry techniques that avoid air, solvents, and heat exposure, culminating in an encapsulation step. We demonstrate the utility of this method by fabricating and characterizing K2Cr3As3 and WTe2 devices, a one- and two-dimensional material, respectively. The results show that our technique preserves the integrity of the materials, provides excellent contact interfaces, and is broadly applicable to a range of sensitive materials.
title A non-invasive dry-transfer method for fabricating mesoscopic devices on sensitive materials
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2508.19550