Low Loss Aluminum Nitride Waveguide Fabrication: Propagation Loss Reduction Through ALD and RTA

Fuente: arXiv

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Bibliographic Details
Main Authors:	Videnov, Nikolay, Day, Matthew L., Bajcsy, Michal
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2508.20245