Electrical Impedance Tomography with an Integrated Picoliter-Volume Subtractive Microfluidic Chamber in 65 nm CMOS
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arXiv
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| Main Authors: | , , |
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| Format: | Preprint |
| Published: |
2025
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| _version_ | 1866909757363716096 |
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| author | de Oliveira, Antonio Victor Machado Sarkar, Debjit Hajimiri, Ali |
| author_facet | de Oliveira, Antonio Victor Machado Sarkar, Debjit Hajimiri, Ali |
| contents | Electrical impedance tomography with fully integrated microfluidics and electronics is presented for the first time in a CMOS chip. Chambers and electrodes are fabricated in the interconnect layers of a 65 nm CMOS chip through post-processing, enabling picoliter-volumes to be processed and imaged. Tomography maps are reconstructed by reading out voltages from a 16-element electrode array and processing the data off-chip, and sources of variation in reconstruction are discussed. The EIT system presented in this work serves as a proof-of-concept towards using CMOS as a platform for co-integrated microfluidics and electronics. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2508_20431 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Electrical Impedance Tomography with an Integrated Picoliter-Volume Subtractive Microfluidic Chamber in 65 nm CMOS de Oliveira, Antonio Victor Machado Sarkar, Debjit Hajimiri, Ali Instrumentation and Detectors Signal Processing Electrical impedance tomography with fully integrated microfluidics and electronics is presented for the first time in a CMOS chip. Chambers and electrodes are fabricated in the interconnect layers of a 65 nm CMOS chip through post-processing, enabling picoliter-volumes to be processed and imaged. Tomography maps are reconstructed by reading out voltages from a 16-element electrode array and processing the data off-chip, and sources of variation in reconstruction are discussed. The EIT system presented in this work serves as a proof-of-concept towards using CMOS as a platform for co-integrated microfluidics and electronics. |
| title | Electrical Impedance Tomography with an Integrated Picoliter-Volume Subtractive Microfluidic Chamber in 65 nm CMOS |
| topic | Instrumentation and Detectors Signal Processing |
| url | https://arxiv.org/abs/2508.20431 |