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Main Authors: Hilbrunner, Constantin, Meyer, Tobias, Malindretos, Joerg, Rizzi, Angela
Format: Preprint
Published: 2025
Subjects:
Online Access:https://arxiv.org/abs/2508.21537
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author Hilbrunner, Constantin
Meyer, Tobias
Malindretos, Joerg
Rizzi, Angela
author_facet Hilbrunner, Constantin
Meyer, Tobias
Malindretos, Joerg
Rizzi, Angela
contents 2H-TaS$_2$ few layers have been grown epitaxially onto GaN(0001). A high substrate growth temperature of 825$^{\circ}$C induces best structural properties of the overlayer, as revealed by in-situ electron diffraction (RHEED and LEED). The 2D-overlayer grows unstrained right after deposition of a monolayer. However, evidence of pits at the interface is provided by scanning transmission electron microscopy, most probably due to GaN thermal decomposition at the high growth temperature. In-situ x-ray photoemission spectroscopy shows core level shifts that are consistently related to electron transfer from the n-GaN(0001) to the 2H-TaS$_2$ epitaxial layer as well as the formation of a high concentration of nitrogen vacancies close to the interface. Further, no chemical reaction at the interface between the substrate and the grown TaS$_2$ overlayer is deduced from XPS, which corroborates the possibility of integration of 2D 2H-TaS$_2$ with an important 3D semiconducting material like GaN.
format Preprint
id arxiv_https___arxiv_org_abs_2508_21537
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Molecular Beam Epitaxy of 2H-TaS$_2$ few-layers on GaN(0001)
Hilbrunner, Constantin
Meyer, Tobias
Malindretos, Joerg
Rizzi, Angela
Materials Science
2H-TaS$_2$ few layers have been grown epitaxially onto GaN(0001). A high substrate growth temperature of 825$^{\circ}$C induces best structural properties of the overlayer, as revealed by in-situ electron diffraction (RHEED and LEED). The 2D-overlayer grows unstrained right after deposition of a monolayer. However, evidence of pits at the interface is provided by scanning transmission electron microscopy, most probably due to GaN thermal decomposition at the high growth temperature. In-situ x-ray photoemission spectroscopy shows core level shifts that are consistently related to electron transfer from the n-GaN(0001) to the 2H-TaS$_2$ epitaxial layer as well as the formation of a high concentration of nitrogen vacancies close to the interface. Further, no chemical reaction at the interface between the substrate and the grown TaS$_2$ overlayer is deduced from XPS, which corroborates the possibility of integration of 2D 2H-TaS$_2$ with an important 3D semiconducting material like GaN.
title Molecular Beam Epitaxy of 2H-TaS$_2$ few-layers on GaN(0001)
topic Materials Science
url https://arxiv.org/abs/2508.21537