Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
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arXiv
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| Main Authors: | , , , , , , , |
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| Format: | Preprint |
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2025
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| _version_ | 1866912581266964480 |
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| author | Yao, Ziqian Chuluhadze, Vakhtang Liu, Zihuan Niu, Xiaoyu Hsu, Tzu-Husan Kim, Byeongjin Hall, Neal Lu, Ruochen |
| author_facet | Yao, Ziqian Chuluhadze, Vakhtang Liu, Zihuan Niu, Xiaoyu Hsu, Tzu-Husan Kim, Byeongjin Hall, Neal Lu, Ruochen |
| contents | This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the piezoelectric film stack are employed to enable efficient lateral field excitation of the flexural mode. Thanks to its high piezoelectric coefficient and low dielectric loss, the X-cut LN exhibits high figure of merits (FoMs) as both sensors and transducers. The fabricated PMUT demonstrates an out-of-plane mode near 1 MHz with an electromechanical coupling of 3.6\%. Laser Doppler vibrometry further validates the finite element analysis, showing a peak center displacement of 340 pm/V. These results establish bi-layer P3F LN PMUTs as a promising platform for compact and high-performance ultrasonic transducers. Future work will focus on theoretical analysis, modeling of the measured data, improving the design of the transducer topology, and mitigating feedthrough effects. |
| format | Preprint |
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arxiv_https___arxiv_org_abs_2509_00600 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer Yao, Ziqian Chuluhadze, Vakhtang Liu, Zihuan Niu, Xiaoyu Hsu, Tzu-Husan Kim, Byeongjin Hall, Neal Lu, Ruochen Applied Physics This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the piezoelectric film stack are employed to enable efficient lateral field excitation of the flexural mode. Thanks to its high piezoelectric coefficient and low dielectric loss, the X-cut LN exhibits high figure of merits (FoMs) as both sensors and transducers. The fabricated PMUT demonstrates an out-of-plane mode near 1 MHz with an electromechanical coupling of 3.6\%. Laser Doppler vibrometry further validates the finite element analysis, showing a peak center displacement of 340 pm/V. These results establish bi-layer P3F LN PMUTs as a promising platform for compact and high-performance ultrasonic transducers. Future work will focus on theoretical analysis, modeling of the measured data, improving the design of the transducer topology, and mitigating feedthrough effects. |
| title | Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2509.00600 |