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| Main Authors: | , , , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2509.02229 |
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Table of Contents:
- Oxygen vacancies are often essential for stabilizing the orthorhombic ferroelectric phase in HfO$_2$, with cationic doping widely employed to introduce such defects. In contrast, systematic studies on anionic doping to induce ferroelectricity remain largely in nascent stages. On epitaxial Y:HfO$_2$ grown on ITO buffered YSZ substrates that crystallize in a mixed monoclinic (non-polar) and orthorhombic (polar) phases, we introduce nitrogen doping via post deposition rapid thermal annealing (RTA) in N$_2$ atmosphere at 900~$^\circ$C. As the annealing time increases from 10s to 4min, the monoclinic phase fraction diminishes, enabling the emergence of well-defined ferroelectric loops in films annealed beyond 2~min. We clearly show that this is an effect of nitrogen incorporation (doping) into the samples through a suite of structure-property correlation measurements including x-ray photoelectron spectroscopy. These results reveal that nitrogen actively participates in the RTA-induced phase stabilization, enabling ferroelectricity in epitaxial Y:HfO$_2$ without sacrificing crystallographic coherence, providing a viable pathway for structure-property correlation studies and a model system to study opto-electronic devices integrated with ferroelectrics.