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High-$Q$ membrane resonators using ultra-high-stress crystalline TiN films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Matsuyama, Yuki, Shirai, Shotaro, Nakamura, Ippei, Tokunari, Masao, Terai, Hirotaka, Hishida, Yuji, Sasaki, Ryo, Tominaga, Yusuke, Noguchi, Atsushi
Format:	Preprint
Published:	2025
Subjects:	Mesoscale and Nanoscale Physics Materials Science
Online Access:	Acceder al recurso
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