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Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling

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Bibliographic Details
Main Authors:	Theis, Joseph G., Werner, Gregory R., Jenkins, Thomas G., Main, Daniel, Cary, John R.
Format:	Preprint
Published:	2025
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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