Palladium-Coated Laterally Vibrating Resonators (LVRs) for Hydrogen Sensing
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arXiv
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| Autori principali: | , , , , , , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2025
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| _version_ | 1866918136002904064 |
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| author | Giubilei, Gaia Ayed, Farah Ben Sautriot, Yvonne Venditti, Aurelio Zhang, Kun Calisgan, Sila Deniz Simeoni, Pietro Qian, Zhenyun Rinaldi, Matteo |
| author_facet | Giubilei, Gaia Ayed, Farah Ben Sautriot, Yvonne Venditti, Aurelio Zhang, Kun Calisgan, Sila Deniz Simeoni, Pietro Qian, Zhenyun Rinaldi, Matteo |
| contents | This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film. The micro-electro-mechanical system (MEMS) device operates by detecting shifts in resonant frequency resulting from hydrogen absorption in the Pd layer. The sensor demonstrates a high mechanical quality factor (Qm) of 820, an electromechanical coupling coefficient (kt2) of 3.18%, and an enhanced responsivity of 26 Hz/ppm in the low-parts per million (ppm) range, making it highly suitable for hydrogen leak detection. Compared to existing MHz-range technologies, the sensor achieves up to 50x higher sensitivity, while also offering multi-frequency definition in a single lithographic step, minimal footprint, and the highest quality factor among comparable miniaturized platforms. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2509_04511 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Palladium-Coated Laterally Vibrating Resonators (LVRs) for Hydrogen Sensing Giubilei, Gaia Ayed, Farah Ben Sautriot, Yvonne Venditti, Aurelio Zhang, Kun Calisgan, Sila Deniz Simeoni, Pietro Qian, Zhenyun Rinaldi, Matteo Instrumentation and Detectors Systems and Control This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film. The micro-electro-mechanical system (MEMS) device operates by detecting shifts in resonant frequency resulting from hydrogen absorption in the Pd layer. The sensor demonstrates a high mechanical quality factor (Qm) of 820, an electromechanical coupling coefficient (kt2) of 3.18%, and an enhanced responsivity of 26 Hz/ppm in the low-parts per million (ppm) range, making it highly suitable for hydrogen leak detection. Compared to existing MHz-range technologies, the sensor achieves up to 50x higher sensitivity, while also offering multi-frequency definition in a single lithographic step, minimal footprint, and the highest quality factor among comparable miniaturized platforms. |
| title | Palladium-Coated Laterally Vibrating Resonators (LVRs) for Hydrogen Sensing |
| topic | Instrumentation and Detectors Systems and Control |
| url | https://arxiv.org/abs/2509.04511 |