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| Main Authors: | , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2509.04728 |
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| _version_ | 1866915480205262848 |
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| author | Tang, Rui-Ji Zhao, Shu-Xia Tian, Yu |
| author_facet | Tang, Rui-Ji Zhao, Shu-Xia Tian, Yu |
| contents | In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2509_04728 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation Tang, Rui-Ji Zhao, Shu-Xia Tian, Yu Plasma Physics In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude. |
| title | Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation |
| topic | Plasma Physics |
| url | https://arxiv.org/abs/2509.04728 |