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Investigation of tantalum films growth for coplanar resonators with internal quality factors above ten million

Fuente: arXiv

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Bibliographic Details
Main Authors:	Zikiy, E. V., Smirnov, N. S., Krivko, E. A., Matanin, A. R., Ivanov, A. I., Malevannaya, E. I., Polozov, V. I., Bukatin, S. V., Baklykov, D. A., Stepanov, I. A., Kotenkov, S. A., Bychkov, S. P., Ryzhikov, I. A., Andriyash, A. V., Rodionov, I. A.
Format:	Preprint
Published:	2025
Subjects:	Quantum Physics Materials Science
Online Access:	Acceder al recurso
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