Depth Profiling of Oxygen Migration in Ta/HfO2 Stacks During Ionic Liquid Gating
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arXiv
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| Main Authors: | Bednarz, Beatrice, Wortmann, Martin, Kuschel, Olga, Kammerbauer, Fabian, Kläui, Mathias, Hütten, Andreas, Wollschläger, Joachim, Jakob, Gerhard, Kuschel, Timo |
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| Format: | Preprint |
| Published: |
2025
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