APA (7th ed.) Citation

Nayak, S., Andrianov, N., Gruhn, T., & Miranda, J. (2025). Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry.

Chicago Style (17th ed.) Citation

Nayak, Sanjay, Nikolai Andrianov, Thomas Gruhn, and Joaquin Miranda. Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry. 2025.

MLA (9th ed.) Citation

Nayak, Sanjay, et al. Atomic Layer Etching of Aluminum Nitride: Mechanistic Insights from First-Principles Studies of Chlorine Chemistry. 2025.