Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Preprint |
| Published: |
2025
|
| Subjects: | |
| Online Access: | https://arxiv.org/abs/2509.07658 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Table of Contents:
- Structural characterization of nanoscale-two-metal-phase systems, which exhibit partial, complete, or no mixing when co-sputtered with a few percent of a minority element, is extremely challenging. Co-sputtering two metals at room temperature results in frozen disorder within the deposited films. Distinguishing the contribution of each metal phase, determining the distribution and self-organization of the second constituent element within the lattice, accurately quantifying the extra element content, and assessing internal disorder through diffraction analysis are complex and require the development of a suitable model to fit diffraction patterns from various geometries. Here, we present a model to describe the structural distribution of alloy elements in magnetron-sputtered Cu thin films, exploring two contrasting cases: 1) with the mutually immiscible Nb and 2) with Pd, which has a negative heat of mixing with Cu, forming stable alloys. A comparison between X-ray diffraction data and energy-dispersive X-ray spectroscopy-derived elemental distribution is discussed.