Scaling High-Performance Nanoribbon Transistors with Monolayer Transition Metal Dichalcogenides

Fuente: arXiv
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Autores principales: Peña, Tara, Persson, Anton E. O., Krayev, Andrey, Friðriksdóttir, Áshildur, Su, Haotian, Lee, Yuan-Mau, Song, Young Suh, Neilson, Kathryn, Zhang, Zhepeng, Hoang, Anh Tuan, Yang, Jerry A., Hoang, Lauren, Wang, Shan X., Mannix, Andrew J., McIntyre, Paul C., Pop, Eric
Formato: Preprint
Publicado: 2025
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author Peña, Tara
Persson, Anton E. O.
Krayev, Andrey
Friðriksdóttir, Áshildur
Su, Haotian
Lee, Yuan-Mau
Song, Young Suh
Neilson, Kathryn
Zhang, Zhepeng
Hoang, Anh Tuan
Yang, Jerry A.
Hoang, Lauren
Wang, Shan X.
Mannix, Andrew J.
McIntyre, Paul C.
Pop, Eric
author_facet Peña, Tara
Persson, Anton E. O.
Krayev, Andrey
Friðriksdóttir, Áshildur
Su, Haotian
Lee, Yuan-Mau
Song, Young Suh
Neilson, Kathryn
Zhang, Zhepeng
Hoang, Anh Tuan
Yang, Jerry A.
Hoang, Lauren
Wang, Shan X.
Mannix, Andrew J.
McIntyre, Paul C.
Pop, Eric
contents Nanoscale transistors require aggressive reduction of all channel dimensions: length, width, and thickness. While monolayer two-dimensional semiconductors (2DS) offer ultimate thickness scaling, good performance has largely been achieved only in micrometer-wide channels. Here, we demonstrate both $\it{n}$- and $\it{p}$-type nanoribbon transistors based on monolayer 2DS, fabricated using a multi-patterning process, reaching channel widths and lengths down to 25-30 nm. 'Anchored' contacts improve device yield, while nanoscale imaging, including tip-enhanced photoluminescence, reveals minimal edge degradation. The devices reach on-state currents up to 560, 420, and 130 $μ$A $μ$m$^{-1}$ at 1 V drain-to-source voltage for $\it{n}$-type MoS$_{2}$, WS$_{2}$, and $\it{p}$-type WSe$_{2}$, respectively, integrated with thin high-$κ$ dielectrics. These results surpass prior reports for single-gated nanoribbons, the WS$_{2}$ by over 100 times, even in normally-off (enhancement-mode) transistors. Taken together, these findings suggest that top down patterned 2DS nanoribbons are promising building blocks for future nanosheet transistors.
format Preprint
id arxiv_https___arxiv_org_abs_2509_09964
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Scaling High-Performance Nanoribbon Transistors with Monolayer Transition Metal Dichalcogenides
Peña, Tara
Persson, Anton E. O.
Krayev, Andrey
Friðriksdóttir, Áshildur
Su, Haotian
Lee, Yuan-Mau
Song, Young Suh
Neilson, Kathryn
Zhang, Zhepeng
Hoang, Anh Tuan
Yang, Jerry A.
Hoang, Lauren
Wang, Shan X.
Mannix, Andrew J.
McIntyre, Paul C.
Pop, Eric
Materials Science
Mesoscale and Nanoscale Physics
Nanoscale transistors require aggressive reduction of all channel dimensions: length, width, and thickness. While monolayer two-dimensional semiconductors (2DS) offer ultimate thickness scaling, good performance has largely been achieved only in micrometer-wide channels. Here, we demonstrate both $\it{n}$- and $\it{p}$-type nanoribbon transistors based on monolayer 2DS, fabricated using a multi-patterning process, reaching channel widths and lengths down to 25-30 nm. 'Anchored' contacts improve device yield, while nanoscale imaging, including tip-enhanced photoluminescence, reveals minimal edge degradation. The devices reach on-state currents up to 560, 420, and 130 $μ$A $μ$m$^{-1}$ at 1 V drain-to-source voltage for $\it{n}$-type MoS$_{2}$, WS$_{2}$, and $\it{p}$-type WSe$_{2}$, respectively, integrated with thin high-$κ$ dielectrics. These results surpass prior reports for single-gated nanoribbons, the WS$_{2}$ by over 100 times, even in normally-off (enhancement-mode) transistors. Taken together, these findings suggest that top down patterned 2DS nanoribbons are promising building blocks for future nanosheet transistors.
title Scaling High-Performance Nanoribbon Transistors with Monolayer Transition Metal Dichalcogenides
topic Materials Science
Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2509.09964