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| Main Authors: | , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2509.13876 |
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| _version_ | 1866916954622656512 |
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| author | Liu, Quan-Shan Coke, Maddison Lincoln, Alexander Wren, William Echtermeyer, Tim Crowe, Iain Curry, Richard J |
| author_facet | Liu, Quan-Shan Coke, Maddison Lincoln, Alexander Wren, William Echtermeyer, Tim Crowe, Iain Curry, Richard J |
| contents | The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing, at temperatures between 500 °C and 700 °C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) on the MRR surface, the cavity optical properties; Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 °C and 600 °C, but recover again for annealing at 650 °C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2509_13876 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices Liu, Quan-Shan Coke, Maddison Lincoln, Alexander Wren, William Echtermeyer, Tim Crowe, Iain Curry, Richard J Optics The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing, at temperatures between 500 °C and 700 °C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) on the MRR surface, the cavity optical properties; Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 °C and 600 °C, but recover again for annealing at 650 °C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance. |
| title | Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices |
| topic | Optics |
| url | https://arxiv.org/abs/2509.13876 |