Room temperature reactive sputtering deposition of titanium nitride with high sheet kinetic inductance

Fuente: arXiv
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Bibliographic Details
Main Authors: Li, Juliang, Barry, Peter S., Cecil, Tom, Lisovenko, Marharyta, Yefremenko, Volodymyr, Wang, Gensheng, Kruhlov, Serhii, Karapetrov, Goran, Chang, Clarence
Format: Preprint
Published: 2025
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