Room temperature reactive sputtering deposition of titanium nitride with high sheet kinetic inductance
Fuente:
arXiv
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| Main Authors: | Li, Juliang, Barry, Peter S., Cecil, Tom, Lisovenko, Marharyta, Yefremenko, Volodymyr, Wang, Gensheng, Kruhlov, Serhii, Karapetrov, Goran, Chang, Clarence |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | |
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