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| Main Authors: | , , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2509.17184 |
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| _version_ | 1866912598489825280 |
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| author | de Galarreta, Carlota Ruiz Zhao, Yinghao Mendoza-Carreño, Jose Caicedo, Jose M Santiso, Jose Wright, C David Alonso, M Isabel Mihi, Agustin |
| author_facet | de Galarreta, Carlota Ruiz Zhao, Yinghao Mendoza-Carreño, Jose Caicedo, Jose M Santiso, Jose Wright, C David Alonso, M Isabel Mihi, Agustin |
| contents | The combination of metasurfaces with chalcogenide phase-change materials is a highly promising route towards the development of multifunctional and reconfigurable nanophotonic devices. However, their transition into real-world devices is hindered by several technological challenges. This includes, amongst others, the lack of large area photonic architectures produced via scalable nanofabrication methods, as required for free-space photonic applications, along with the ability to withstand the high temperatures required for the phase-change process. In this work, we present a scalable nanofabrication strategy for the production of reconfigurable metasurfaces based on high-throughput, large-area nanoimprint lithography that is fully compatible with chalcogenide phase-change materials processing. Our approach involves the direct imprinting of high melting point, thermally stable TiO2 nanoparticle pastes, followed by the deposition of an Sb2Se3 thin film as the phase-change material active layer. The patterned titania film enables the creation of thermally robust metasurfaces, overcoming the limitations of conventional polymer-based nanoimprint approaches. The versatility of our approach is showcased by producing phase-change devices with two distinct functionalities: (i) metasurfaces with tunable spectral band switching and amplitude modulation capabilities across the near- to mid-infrared, and (ii) reconfigurable chiral metasurfaces, whose chiroptical activity can be switched between the visible and the near-infrared. Experimental results show excellent agreement with numerical simulations and reveal high uniformity across large areas. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2509_17184 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Reconfigurable, Temperature Resilient Phase-Change Metasurfaces Fabricated via High Throughput Nanoimprinting Lithography de Galarreta, Carlota Ruiz Zhao, Yinghao Mendoza-Carreño, Jose Caicedo, Jose M Santiso, Jose Wright, C David Alonso, M Isabel Mihi, Agustin Optics The combination of metasurfaces with chalcogenide phase-change materials is a highly promising route towards the development of multifunctional and reconfigurable nanophotonic devices. However, their transition into real-world devices is hindered by several technological challenges. This includes, amongst others, the lack of large area photonic architectures produced via scalable nanofabrication methods, as required for free-space photonic applications, along with the ability to withstand the high temperatures required for the phase-change process. In this work, we present a scalable nanofabrication strategy for the production of reconfigurable metasurfaces based on high-throughput, large-area nanoimprint lithography that is fully compatible with chalcogenide phase-change materials processing. Our approach involves the direct imprinting of high melting point, thermally stable TiO2 nanoparticle pastes, followed by the deposition of an Sb2Se3 thin film as the phase-change material active layer. The patterned titania film enables the creation of thermally robust metasurfaces, overcoming the limitations of conventional polymer-based nanoimprint approaches. The versatility of our approach is showcased by producing phase-change devices with two distinct functionalities: (i) metasurfaces with tunable spectral band switching and amplitude modulation capabilities across the near- to mid-infrared, and (ii) reconfigurable chiral metasurfaces, whose chiroptical activity can be switched between the visible and the near-infrared. Experimental results show excellent agreement with numerical simulations and reveal high uniformity across large areas. |
| title | Reconfigurable, Temperature Resilient Phase-Change Metasurfaces Fabricated via High Throughput Nanoimprinting Lithography |
| topic | Optics |
| url | https://arxiv.org/abs/2509.17184 |