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Fully automated inverse co-optimization of templates and block copolymer blending recipes for DSA lithography

Fuente: arXiv
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Bibliographic Details
Main Authors: Zhou, Yuhao, Shen, Huangyan, Song, Qingliang, Dong, Qingshu, Li, Jianfeng, Li, Weihua
Format: Preprint
Published: 2025
Subjects:
Computational Physics
Artificial Intelligence
Computational Engineering, Finance, and Science
Online Access:
Acceder al recurso
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