Finding the temperature window for atomic layer deposition of ruthenium metal via efficient phonon calculations

Fuente: arXiv

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Bibliographic Details
Main Authors:	Fonari, Alexandr, Elliott, Simon D., Brock, Casey N., Li, Yan, Gavartin, Jacob, Halls, Mathew D.
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2510.03975