Multi-NA Metalens Array for Compact High-NA Microscopy
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arXiv
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| Main Authors: | , , , , |
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| Format: | Preprint |
| Published: |
2025
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| _version_ | 1866911198525521920 |
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| author | Khalilian, Alireza Fan, Jie Yeganeh, Mehdi Sh. Lo, Joe Yi, Yasha |
| author_facet | Khalilian, Alireza Fan, Jie Yeganeh, Mehdi Sh. Lo, Joe Yi, Yasha |
| contents | We demonstrate a CMOS-compatible silicon-rich nitride metalens array for visible microscopy at 660 nm. Three co-planar elements provide numerical apertures of 0.54, 0.92, and 0.97, enabling within-sample NA benchmarking without objective swaps. Imaging of annular cell monolayers labeled in the AF647 ZO-1 channel shows progressive sharpening of junctional edges and reduced blur with increasing NA, consistent with diffraction-limited scaling. The compact, planar platform supports direct integration with image sensors, offering a practical route to high-NA fluorescence bioimaging in space-constrained, low-cost systems. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2510_07123 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Multi-NA Metalens Array for Compact High-NA Microscopy Khalilian, Alireza Fan, Jie Yeganeh, Mehdi Sh. Lo, Joe Yi, Yasha Optics Applied Physics We demonstrate a CMOS-compatible silicon-rich nitride metalens array for visible microscopy at 660 nm. Three co-planar elements provide numerical apertures of 0.54, 0.92, and 0.97, enabling within-sample NA benchmarking without objective swaps. Imaging of annular cell monolayers labeled in the AF647 ZO-1 channel shows progressive sharpening of junctional edges and reduced blur with increasing NA, consistent with diffraction-limited scaling. The compact, planar platform supports direct integration with image sensors, offering a practical route to high-NA fluorescence bioimaging in space-constrained, low-cost systems. |
| title | Multi-NA Metalens Array for Compact High-NA Microscopy |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2510.07123 |