Operator-Consistent Physics-Informed Learning for Wafer Thermal Reconstruction in Lithography

Fuente: arXiv

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Bibliographic Details
Main Authors:	Tao, Ze, Liu, Fujun, Jin, Yuxi, Xu, Ke, Sun, Minghui, Hu, Xiangsheng, Cao, Qi, Xu, Haoran, Wang, Hanxuan
Format:	Preprint
Published:	2025
Subjects:	Mathematical Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2510.09207