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Bibliographic Details
Main Authors: Hansen, Luka, Bilgin, Görkem, Benedikt, Jan
Format: Preprint
Published: 2025
Subjects:
Online Access:https://arxiv.org/abs/2510.09524
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_version_ 1866914086968623104
author Hansen, Luka
Bilgin, Görkem
Benedikt, Jan
author_facet Hansen, Luka
Bilgin, Görkem
Benedikt, Jan
contents Vacuum ultraviolet (VUV) radiation produced by an atmospheric pressure plasma was successfully measured down to wavelengths of 58.4nm utilizing a 20nm thin Si3N4 membrane to transfer the VUV radiation into a vacuum monochromator. This method allows measurements without disturbing the plasma or the spectra. He2 absorption could be observed by filling the monochromator with He. Transmission of the Si3N4 membrane in the region of the He2 excimer continua (58nm to 100 nm) could indirectly be measured and confirms literature values.
format Preprint
id arxiv_https___arxiv_org_abs_2510_09524
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Si3N4 membrane as entrance window for plasma-generated vacuum ultraviolet (VUV) radiation
Hansen, Luka
Bilgin, Görkem
Benedikt, Jan
Plasma Physics
Vacuum ultraviolet (VUV) radiation produced by an atmospheric pressure plasma was successfully measured down to wavelengths of 58.4nm utilizing a 20nm thin Si3N4 membrane to transfer the VUV radiation into a vacuum monochromator. This method allows measurements without disturbing the plasma or the spectra. He2 absorption could be observed by filling the monochromator with He. Transmission of the Si3N4 membrane in the region of the He2 excimer continua (58nm to 100 nm) could indirectly be measured and confirms literature values.
title Si3N4 membrane as entrance window for plasma-generated vacuum ultraviolet (VUV) radiation
topic Plasma Physics
url https://arxiv.org/abs/2510.09524