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Metalorganic Chemical Vapor Deposition of AlScN Thin Films and AlScN/AlN/GaN Heterostructures

Fuente: arXiv

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Bibliographic Details
Main Authors:	Vangipuram, Vijay Gopal Thirupakuzi, Mukit, Abdul, Zhang, Kaitian, Salmani-Rezaie, Salva, Zhao, Hongping
Format:	Preprint
Published:	2025
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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