Thermal scanning probe lithography for fabrication of perforated metallic films
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arXiv
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| Format: | Preprint |
| Veröffentlicht: |
2025
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| author | Pellegrini, Paloma E S Orlandini, Francisco T Nista, Silvia V G Lanteri, Stéphane Hernández-Figueroa, Hugo Enrique Moshkalev, Stanislav |
| author_facet | Pellegrini, Paloma E S Orlandini, Francisco T Nista, Silvia V G Lanteri, Stéphane Hernández-Figueroa, Hugo Enrique Moshkalev, Stanislav |
| contents | Thermal scanning probe lithography offers high resolution and versatility, making it a promising alternative for fabricating photonic devices. Here, we introduce a new method that expands its applications by enabling direct fabrication of arbitrary perforated patterns on a silver film. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2510_12234 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Thermal scanning probe lithography for fabrication of perforated metallic films Pellegrini, Paloma E S Orlandini, Francisco T Nista, Silvia V G Lanteri, Stéphane Hernández-Figueroa, Hugo Enrique Moshkalev, Stanislav Optics Thermal scanning probe lithography offers high resolution and versatility, making it a promising alternative for fabricating photonic devices. Here, we introduce a new method that expands its applications by enabling direct fabrication of arbitrary perforated patterns on a silver film. |
| title | Thermal scanning probe lithography for fabrication of perforated metallic films |
| topic | Optics |
| url | https://arxiv.org/abs/2510.12234 |