Wide-Field Reflective Imaging with an Epi-Illumination Multi-Camera Array Microscope
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arXiv
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| Main Authors: | , , , , , |
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| Format: | Preprint |
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2025
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| _version_ | 1866914096225452032 |
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| author | Bao, Xiangjiang Kreiss, Lucas Cook, Clare B. Gong, Haoyu Harfouche, Mark Horstmeyer, Roarke |
| author_facet | Bao, Xiangjiang Kreiss, Lucas Cook, Clare B. Gong, Haoyu Harfouche, Mark Horstmeyer, Roarke |
| contents | We present an epi-illumination multi-camera array microscope (epi-MCAM) designed for wide-field reflective imaging of non-transparent samples. The epi-MCAM contains 24 tightly packed and synchronized epi-illumination microscope units, arranged in a $4 \times 6$ planar array at 18 mm spacing. Each unit contains a unique CMOS image sensor (13 megapixels each), an objective and tube lens pair, and a beamsplitter and epi-illumination light path. An epi-MCAM capture cycle produces a stitched image covering $72 \times 108~\mathrm{mm}^2$ at a micrometer scale resolution down to 2.46 $μ$m. To image samples exceeding this native field of view, we translate the entire array across the sample surface to enable high-resolution coverage of large objects. We demonstrate the system's ability to image both flat and three-dimensionally structured reflective samples, such as semiconductor wafers and printed circuit boards, which highlight the epi-MCAM's strong potential within industrial inspection applications. |
| format | Preprint |
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arxiv_https___arxiv_org_abs_2510_14238 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Wide-Field Reflective Imaging with an Epi-Illumination Multi-Camera Array Microscope Bao, Xiangjiang Kreiss, Lucas Cook, Clare B. Gong, Haoyu Harfouche, Mark Horstmeyer, Roarke Optics We present an epi-illumination multi-camera array microscope (epi-MCAM) designed for wide-field reflective imaging of non-transparent samples. The epi-MCAM contains 24 tightly packed and synchronized epi-illumination microscope units, arranged in a $4 \times 6$ planar array at 18 mm spacing. Each unit contains a unique CMOS image sensor (13 megapixels each), an objective and tube lens pair, and a beamsplitter and epi-illumination light path. An epi-MCAM capture cycle produces a stitched image covering $72 \times 108~\mathrm{mm}^2$ at a micrometer scale resolution down to 2.46 $μ$m. To image samples exceeding this native field of view, we translate the entire array across the sample surface to enable high-resolution coverage of large objects. We demonstrate the system's ability to image both flat and three-dimensionally structured reflective samples, such as semiconductor wafers and printed circuit boards, which highlight the epi-MCAM's strong potential within industrial inspection applications. |
| title | Wide-Field Reflective Imaging with an Epi-Illumination Multi-Camera Array Microscope |
| topic | Optics |
| url | https://arxiv.org/abs/2510.14238 |