Enhanced Secondary Electron Detection of Single Ion Implants in Silicon Through Thin SiO2 Layers

Fuente: arXiv

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Bibliographic Details
Main Authors:	Schneider, Ella B, Lloyd-Willard, Oscar G, Stockbridge, Kristian, Ludlow, Mark, Eserin, Sam, Antwis, Luke, Cox, David C, Webb, Roger P, Murdin, Ben N, Clowes, Steve K
Format:	Preprint
Published:	2025
Subjects:	Materials Science Quantum Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2510.14495