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Design optimization of silicon nitride nanomechanical resonators for thermal infrared detectors: a guide through key figures of merit

Fuente: arXiv

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Bibliographic Details
Main Authors:	Martini, Paolo, Kanellopulos, Kostas, Schmid, Silvan
Format:	Preprint
Published:	2025
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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