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A low-cost, open-source maskless photolithography stepper for microfabrication

Fuente: arXiv

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Bibliographic Details
Main Authors:	Gonzalez, B. Joel, Bourcart, Elio, Wirant, J. Kent, Juan, Michael, Wang, Justin, Moneck, Matthew T.
Format:	Preprint
Published:	2025
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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