Unveiling Retention Loss Mechanism in FeFETs with Gate-side Interlayer by Decoupling Trapped Charges and Ferroelectric Polarization

Fuente: arXiv
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Autores principales: Han, Runhao, Hu, Tao, Yang, Jia, Dai, Saifei, Ding, Yajing, Bai, Mingkai, Shao, Xianzhou, Chai, Junshuai, Xu, Hao, Luo, Qing, Wang, Wenwu, Ye, Tianchun, Wang, Xiaolei
Formato: Preprint
Publicado: 2025
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author Han, Runhao
Hu, Tao
Yang, Jia
Dai, Saifei
Ding, Yajing
Bai, Mingkai
Shao, Xianzhou
Chai, Junshuai
Xu, Hao
Luo, Qing
Wang, Wenwu
Ye, Tianchun
Wang, Xiaolei
author_facet Han, Runhao
Hu, Tao
Yang, Jia
Dai, Saifei
Ding, Yajing
Bai, Mingkai
Shao, Xianzhou
Chai, Junshuai
Xu, Hao
Luo, Qing
Wang, Wenwu
Ye, Tianchun
Wang, Xiaolei
contents We propose a direct experimental extraction technique for trapped charges and quantitative energy band diagrams in the FeFETs with metal-insulator-ferroelectric-insulator-semiconductor (MIFIS) structure, derived from the physical relationship between Vth and gate-side interlayer (G.IL) thickness. By decoupling trapped charges and ferroelectric polarization, we reveal that: (i) The gateinjected charges and channel-injected charges are excessive and maintain consistent ratios to ferroelectric polarization (~170% and ~130%, respectively). (ii) Retention loss originates from the detrapping of gate-injected charges rather than ferroelectric depolarization. (iii) As the G.IL thickens, the gate-injected charge de-trapping path transforms from gate-side to channel-side. To address the retention loss, careful material design, optimization, and bandgap engineering in the MIFIS structure are crucial. This work advances the understanding of high retention strategies for MIFIS-FeFETs in 3D FE NAND.
format Preprint
id arxiv_https___arxiv_org_abs_2510_15275
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Unveiling Retention Loss Mechanism in FeFETs with Gate-side Interlayer by Decoupling Trapped Charges and Ferroelectric Polarization
Han, Runhao
Hu, Tao
Yang, Jia
Dai, Saifei
Ding, Yajing
Bai, Mingkai
Shao, Xianzhou
Chai, Junshuai
Xu, Hao
Luo, Qing
Wang, Wenwu
Ye, Tianchun
Wang, Xiaolei
Applied Physics
We propose a direct experimental extraction technique for trapped charges and quantitative energy band diagrams in the FeFETs with metal-insulator-ferroelectric-insulator-semiconductor (MIFIS) structure, derived from the physical relationship between Vth and gate-side interlayer (G.IL) thickness. By decoupling trapped charges and ferroelectric polarization, we reveal that: (i) The gateinjected charges and channel-injected charges are excessive and maintain consistent ratios to ferroelectric polarization (~170% and ~130%, respectively). (ii) Retention loss originates from the detrapping of gate-injected charges rather than ferroelectric depolarization. (iii) As the G.IL thickens, the gate-injected charge de-trapping path transforms from gate-side to channel-side. To address the retention loss, careful material design, optimization, and bandgap engineering in the MIFIS structure are crucial. This work advances the understanding of high retention strategies for MIFIS-FeFETs in 3D FE NAND.
title Unveiling Retention Loss Mechanism in FeFETs with Gate-side Interlayer by Decoupling Trapped Charges and Ferroelectric Polarization
topic Applied Physics
url https://arxiv.org/abs/2510.15275