Surface diffusion of phosphorus on Si(100) after PBr3 adsorption

Fuente: arXiv

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Bibliographic Details
Main Authors:	Pavlova, T. V., Shevlyuga, V. M.
Format:	Preprint
Published:	2025
Subjects:	Materials Science Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2510.15599