A Computational Study for Screening High-Selectivity Inhibitors in Area-Selective Atomic Layer Deposition on Amorphous Surfaces

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Kim, Gijin, Kim, Purun-hanul, Hahm, Suk Gyu, Kwon, Myongjong, Park, Byungha, Hong, Changho, Han, Seungwu
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2510.17356