Cover Image

A Computational Study for Screening High-Selectivity Inhibitors in Area-Selective Atomic Layer Deposition on Amorphous Surfaces

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Kim, Gijin, Kim, Purun-hanul, Hahm, Suk Gyu, Kwon, Myongjong, Park, Byungha, Hong, Changho, Han, Seungwu
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Neural Network-Driven Molecular Insights into Alkaline Wet Etching of GaN: Toward Atomistic Precision in Nanostructure Fabrication
by: Kim, Purun-hanul, et al.
Published: (2025)

Direct Observation of Dry Etch‐Induced Selectivity Tailoring of Alkylate Inhibition Layer Using DMATMS Vapor
by: Eunji Sim, et al.
Published: (2025)

Area‐Selective Atomic Layer Deposition on Homogeneous Substrate for Next‐Generation Electronic Devices
by: Min‐Jeong Rhee, et al.
Published: (2025)

Application of pretrained universal machine-learning interatomic potential for physicochemical simulation of liquid electrolytes in Li-ion battery
by: Ju, Suyeon, et al.
Published: (2025)

Unveiling defect motifs in amorphous GeSe using machine learning interatomic potentials
by: Moon, Minseok, et al.
Published: (2025)

Unveiling defect motifs in amorphous GeSe using machine learning interatomic potentials
by: Moon, Minseok, et al.
Published: (2025)

Scale-robust Low Resistance Transport in Atomic Layer Deposited Topological Semimetal Wafers on Amorphous Substrate
by: Lim, Dong-Hyun, et al.
Published: (2025)

A Selective Deposition Strategy of Ultrathin Metal Layer on Sub‐Micrometer‐Pitch Cu Interconnection for Low‐Temperature Hybrid Bonding
by: Zambaga Otgonbayar, et al.
Published: (2025)

Composition‐Controlled Cathode Protective Layer via Powder‐Atomic Layer Deposition for All‐Solid‐State Batteries
by: Kyu Moon Kwon, et al.
Published: (2025)

Atomic-Scale Mechanisms of SiO$_2$ Plasma-Enhanced Chemical Vapor Deposition Revealed by Molecular Dynamics with a Machine-Learning Interatomic Potential
by: Kim, Jaehoon, et al.
Published: (2026)

Composition‐Controlled Cathode Protective Layer via Powder‐Atomic Layer Deposition for All‐Solid‐State Batteries (Adv. Sci. 4/2026)
by: Kyu Moon Kwon, et al.
Published: (2026)

Front Cover: A Selective Deposition Strategy of Ultrathin Metal Layer on Sub‐Micrometer‐Pitch Cu Interconnection for Low‐Temperature Hybrid Bonding (Small Sci. 2/2026)
by: Zambaga Otgonbayar, et al.
Published: (2026)

Area‐Selective Atomic Layer Deposition of AlO x at the Buried Interface for High‐Performance Perovskite Solar Cells
by: Jie Zhang, et al.
Published: (2026)

Atomic Layer Deposition of Hafnium Oxide Passivating Layers on Silicon: Impact of Precursor Selection
by: Sophie L. Pain, et al.
Published: (2024)

Engineering Metastability in Atomic Layer Deposition: Polymorph and Valence Control
by: Jihoon Jeon, et al.
Published: (2026)

Scalable Parallel Algorithm for Graph Neural Network Interatomic Potentials in Molecular Dynamics Simulations
by: Park, Yutack, et al.
Published: (2024)

Soft Sputtering of Large‐Area 2D MoS2 Layers Using Isolated Plasma Soft Deposition for Humidity Sensors
by: Hye‐Young Youn, et al.
Published: (2024)

Ultra‐High Mobility Atomically‐Ordered InGaZnO Transistors Through Atomic Layer Deposition
by: Yoon‐Seo Kim, et al.
Published: (2025)

Bioelectrosynthesis of Signaling Molecules for Selective Modulation of Cell Signaling
by: Myeongeun Lee, et al.
Published: (2025)

Selectively Self‐Aligned Sol‐Gel Copper Oxide for Large‐Area Multi‐Valued Logic Devices
by: Seokhyeon Baek, et al.
Published: (2024)

Low‐Temperature Photocrystallization of Atomic Layer Deposition‐Processed Tin Oxide for Highly Efficient and Flexible Perovskite Solar Cells
by: Dayeon Ko, et al.
Published: (2025)

Autonomously Designed Pulses for Precise, Site-Selective Control of Atomic Qubits
by: Park, Sanghyo, et al.
Published: (2025)

Etching-to-deposition transition in SiO$_2$/Si$_3$N$_4$ using CH$_x$F$_y$ ion-based plasma etching: An atomistic study with neural network potentials
by: An, Hyungmin, et al.
Published: (2025)

Simulation of Atomic Layer Deposition with a Quantum Computer
by: Plekhanov, Evgeny, et al.
Published: (2025)

On Evaluation of Unsupervised Feature Selection for Pattern Classification
by: Kim, Gyu-Il, et al.
Published: (2026)

ADAM Optimization with Adaptive Batch Selection
by: Kim, Gyu Yeol, et al.
Published: (2025)

Selectively Self‐Aligned Sol‐Gel Copper Oxide for Large‐Area Multi‐Valued Logic Devices (Small 26/2025)
by: Seokhyeon Baek, et al.
Published: (2025)

Powder Atomic Layer Deposition–Enabled Stable Perovskite Phosphors for UV‐Wavelength‐Discriminable Luminescent Films
by: Dong Geon Shin, et al.
Published: (2026)

Selection Principle for the Screening Parameters in the Mechanical Response of Amorphous Solids
by: Kaur, Pawandeep, et al.
Published: (2024)

Reliability Engineering of High‐Mobility IGZO Transistors via Gate Insulator Heterostructures Grown by Atomic Layer Deposition
by: Yoon‐Seo Kim, et al.
Published: (2024)

Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
by: Jeongbin Lee, et al.
Published: (2025)

Secant rank and syzygies of projections of elliptic normal curves
by: Han, Changho, et al.
Published: (2026)

Selective Patterning of p‐Type Dopants on MoS2 via Atomic Force Microscopy‐Assisted Surface Modification
by: Euihyun Jo, et al.
Published: (2024)

Data-efficient multi-fidelity training for high-fidelity machine learning interatomic potentials
by: Kim, Jaesun, et al.
Published: (2024)

Self‐Assembled Monolayer‐Free Area‐Selective Atomic Layer Deposition for Confined Structure Integration of High‐Reliability 3D Phase‐Change Memory
by: Rong‐Jiang Zhu, et al.
Published: (2025)

Estimation of Stroke's Motor Function Ability Using Multimodal Biomarkers and the Role of Contralesional Motor Area
by: Da‐Hye Kim, et al.
Published: (2025)

Effect of Atomic Layer Deposition of Ultra‐Thin Oxide on Reactivity and Durability of Perovskite Oxygen Electrodes
by: Jongsu Seo, et al.
Published: (2026)

Effect of Gamma‐Ray Irradiation of Amorphous SnO 2 Electron Selective Layers on the Properties of Ambient‐Air Synthesized Planar Perovskite Solar Cells
by: Beomjun Park, et al.
Published: (2025)

Bacterial Cell Surface Display of an Enzyme Library for Selective Screening of Improved Cellulase Variants
by: Kim Yong-S., Jung Heung-C. and Pan Jae-G
Published: (2000)

Atomic Layer Deposited Al1−xNixO: Low Contact Resistivity Hole‐Selective Contact for Crystalline Silicon Solar Cells
by: Yang Hong, et al.
Published: (2024)