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Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Joel, Moreno, Marilyn, Jimenez, Daniel, Okerstrom, P., Bradley Michael, Lénaïc, Couëdel
Format:	Preprint
Published:	2025
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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