Ultra-high-precision fused silica micro-hole machining via spherical aberration-assisted filamentation and laser-induced deep etching

Fuente: arXiv
Saved in:
Bibliographic Details
Main Authors: Bang, Seunghyun, Kang, Seonghyeon, Lee, Hyunjong, Kim, Hyungsik, Song, Seokho, Lee, Kwang-Geol
Format: Preprint
Published: 2025
Subjects:
Online Access:
Tags: Add Tag
No Tags, Be the first to tag this record!