Characterization of heat transfer in 3D CMOS structures using Sideband Scanning Thermal Wave Microscopy

Fuente: arXiv
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Bibliographic Details
Main Authors: Fonck, Valentin, Razeghi, Mohammadali, Spièce, Jean, Dobson, Phillip, Weaver, Jonathan, Ridgard, George, Noah, Grayson M., Gehring, Pascal
Format: Preprint
Published: 2025
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