Impact of Oxygen Plasma Surface Treatment on Photoresist Adhesion in BaTiO3-Based Photonic Device Fabrication

Fuente: arXiv

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Bibliographic Details
Main Authors:	Kong, Weiyou, Kong, Weijia, Chrostowski, Lukas, Xin, Xin
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2511.00349