Gate Dielectric Engineering with an Ultrathin Silicon-oxide Interfacial Dipole Layer for Low-Leakage Oxide-Semiconductor Memories

Fuente: arXiv
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Bibliographic Details
Main Authors: Athena, Fabia F., Hartanto, Jonathan, Passlack, Matthias, Evans, Jack C., Qin, Jimmy, Dede, Didem, Jana, Koustav, Liu, Shuhan, Peña, Tara, Pop, Eric, Pitner, Greg, Radu, Iuliana P., McIntyre, Paul C., Wong, H. -S. Philip
Format: Preprint
Published: 2025
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