Gate Dielectric Engineering with an Ultrathin Silicon-oxide Interfacial Dipole Layer for Low-Leakage Oxide-Semiconductor Memories
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arXiv
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| Main Authors: | Athena, Fabia F., Hartanto, Jonathan, Passlack, Matthias, Evans, Jack C., Qin, Jimmy, Dede, Didem, Jana, Koustav, Liu, Shuhan, Peña, Tara, Pop, Eric, Pitner, Greg, Radu, Iuliana P., McIntyre, Paul C., Wong, H. -S. Philip |
|---|---|
| Format: | Preprint |
| Published: |
2025
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