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Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma

Fuente: arXiv

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Bibliographic Details
Main Authors:	Chen, Ivy I., Ezzy, Mariya, Shi, Emily Hsue-Chi, Frez, Clifford F., Suraj, Yi, Lin, Bagheri, Mahmood, Renzas, James R., Marandi, Alireza, Greer, Frank, Minnich, Austin J.
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
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