Fabrication and characterization of high-Q silicon nitride membrane resonators

Fuente: arXiv

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Bibliographic Details
Main Authors:	Hyatt, Atkin D., Flores, Oscar A., Agrawal, Aman R., Condos, Charles A., Wilson, Dalziel J.
Format:	Preprint
Published:	2025
Subjects:	Mesoscale and Nanoscale Physics Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2511.02166