Fabrication and characterization of high-Q silicon nitride membrane resonators
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arXiv
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| Autori principali: | , , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2025
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| _version_ | 1866908626513297408 |
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| author | Hyatt, Atkin D. Flores, Oscar A. Agrawal, Aman R. Condos, Charles A. Wilson, Dalziel J. |
| author_facet | Hyatt, Atkin D. Flores, Oscar A. Agrawal, Aman R. Condos, Charles A. Wilson, Dalziel J. |
| contents | Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal engineering techniques. Fabrication and characterization of silicon nitride membranes has become a form of tacit knowledge in optomechanics research groups. Here we present a video run-through of the design, fabrication, and characterization of a contemporary silicon nitride membrane resonator (specifically, a centimeter-scale Si3N4 nanoribbon supporting $Q>10^8$ torsion modes). Our tutorial can serve as a starting point or refresher for practitioners in the field. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2511_02166 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Fabrication and characterization of high-Q silicon nitride membrane resonators Hyatt, Atkin D. Flores, Oscar A. Agrawal, Aman R. Condos, Charles A. Wilson, Dalziel J. Mesoscale and Nanoscale Physics Applied Physics Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal engineering techniques. Fabrication and characterization of silicon nitride membranes has become a form of tacit knowledge in optomechanics research groups. Here we present a video run-through of the design, fabrication, and characterization of a contemporary silicon nitride membrane resonator (specifically, a centimeter-scale Si3N4 nanoribbon supporting $Q>10^8$ torsion modes). Our tutorial can serve as a starting point or refresher for practitioners in the field. |
| title | Fabrication and characterization of high-Q silicon nitride membrane resonators |
| topic | Mesoscale and Nanoscale Physics Applied Physics |
| url | https://arxiv.org/abs/2511.02166 |