Extending Reflectometry Range, A Zero-Crossing Algorithm for Thick Film Metrology

Fuente: arXiv
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Bibliographic Details
Main Authors: Zhou, Zimu, Lopez-Guerra, Enrique, Zana, Iulica, Nguyen, Vu, Tran, Nguyen Quoc Huy, Zhou, Bojun, Qian, Gary, Kwan, Michael, Wilkens, Peter, Chien, Chester
Format: Preprint
Published: 2025
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