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Process-structure-property relationships in subtractive fabrication of silicon nitride microresonators for nonlinear photonics

Fuente: arXiv

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Bibliographic Details
Main Authors:	Rukh, Lala, Colación, Gabriel M., Buck, Franco H., Drake, Tara E.
Format:	Preprint
Published:	2025
Subjects:	Optics
Online Access:	Acceder al recurso
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