Correcting Fabrication-Induced Curvature in Micromirror-Based Spatial Light Modulators with a Microlens Array
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arXiv
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| Format: | Preprint |
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2025
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| author | Kang, Munkyu Murray, Elizabeth Kabuli, Leyla A. Muller, Rikky Waller, Laura |
| author_facet | Kang, Munkyu Murray, Elizabeth Kabuli, Leyla A. Muller, Rikky Waller, Laura |
| contents | Computer generated holography requires high-speed spatial light modulators (SLMs) for dynamically patterning light in 3D. Piston-motion micromirror-based SLMs support high-speed ($\geq$ 10 kHz) phase modulation; however, fabricating micromirror arrays with sufficient fill factor necessary for high diffraction efficiency is challenging. In particular, the larger mirrors of high fill factor designs are susceptible to stress-induced curvature that significantly degrades optical performance. In this work, we introduce an optical compensation method using a pitch-matched microlens array (MLA) to focus light onto just the center of each mirror. Our approach thus avoids curvature-induced artifacts and improves optical fill factor to nearly 100$\%$, independent of the original mechanical fill factor. Through simulations and experiments on a fabricated micromirror array with bowed mirrors, we show that the Pearson correlation coefficient of the imparted phase profile is improved from 0.11 to 0.85 and the brightness of a holographically-generated single spot is enhanced by 8$\times$ with our microlens array in place. Our hybrid optical-electromechanical strategy thus provides a scalable path toward high-speed, high-fidelity wavefront control for applications such as adaptive optics, holographic displays, and optogenetics. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2511_03175 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Correcting Fabrication-Induced Curvature in Micromirror-Based Spatial Light Modulators with a Microlens Array Kang, Munkyu Murray, Elizabeth Kabuli, Leyla A. Muller, Rikky Waller, Laura Optics Computer generated holography requires high-speed spatial light modulators (SLMs) for dynamically patterning light in 3D. Piston-motion micromirror-based SLMs support high-speed ($\geq$ 10 kHz) phase modulation; however, fabricating micromirror arrays with sufficient fill factor necessary for high diffraction efficiency is challenging. In particular, the larger mirrors of high fill factor designs are susceptible to stress-induced curvature that significantly degrades optical performance. In this work, we introduce an optical compensation method using a pitch-matched microlens array (MLA) to focus light onto just the center of each mirror. Our approach thus avoids curvature-induced artifacts and improves optical fill factor to nearly 100$\%$, independent of the original mechanical fill factor. Through simulations and experiments on a fabricated micromirror array with bowed mirrors, we show that the Pearson correlation coefficient of the imparted phase profile is improved from 0.11 to 0.85 and the brightness of a holographically-generated single spot is enhanced by 8$\times$ with our microlens array in place. Our hybrid optical-electromechanical strategy thus provides a scalable path toward high-speed, high-fidelity wavefront control for applications such as adaptive optics, holographic displays, and optogenetics. |
| title | Correcting Fabrication-Induced Curvature in Micromirror-Based Spatial Light Modulators with a Microlens Array |
| topic | Optics |
| url | https://arxiv.org/abs/2511.03175 |