Saved in:
Bibliographic Details
Main Authors: Kang, Munkyu, Murray, Elizabeth, Kabuli, Leyla A., Muller, Rikky, Waller, Laura
Format: Preprint
Published: 2025
Subjects:
Online Access:https://arxiv.org/abs/2511.03175
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1866911719106805760
author Kang, Munkyu
Murray, Elizabeth
Kabuli, Leyla A.
Muller, Rikky
Waller, Laura
author_facet Kang, Munkyu
Murray, Elizabeth
Kabuli, Leyla A.
Muller, Rikky
Waller, Laura
contents Computer generated holography requires high-speed spatial light modulators (SLMs) for dynamically patterning light in 3D. Piston-motion micromirror-based SLMs support high-speed ($\geq$ 10 kHz) phase modulation; however, fabricating micromirror arrays with sufficient fill factor necessary for high diffraction efficiency is challenging. In particular, the larger mirrors of high fill factor designs are susceptible to stress-induced curvature that significantly degrades optical performance. In this work, we introduce an optical compensation method using a pitch-matched microlens array (MLA) to focus light onto just the center of each mirror. Our approach thus avoids curvature-induced artifacts and improves optical fill factor to nearly 100$\%$, independent of the original mechanical fill factor. Through simulations and experiments on a fabricated micromirror array with bowed mirrors, we show that the Pearson correlation coefficient of the imparted phase profile is improved from 0.11 to 0.85 and the brightness of a holographically-generated single spot is enhanced by 8$\times$ with our microlens array in place. Our hybrid optical-electromechanical strategy thus provides a scalable path toward high-speed, high-fidelity wavefront control for applications such as adaptive optics, holographic displays, and optogenetics.
format Preprint
id arxiv_https___arxiv_org_abs_2511_03175
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Correcting Fabrication-Induced Curvature in Micromirror-Based Spatial Light Modulators with a Microlens Array
Kang, Munkyu
Murray, Elizabeth
Kabuli, Leyla A.
Muller, Rikky
Waller, Laura
Optics
Computer generated holography requires high-speed spatial light modulators (SLMs) for dynamically patterning light in 3D. Piston-motion micromirror-based SLMs support high-speed ($\geq$ 10 kHz) phase modulation; however, fabricating micromirror arrays with sufficient fill factor necessary for high diffraction efficiency is challenging. In particular, the larger mirrors of high fill factor designs are susceptible to stress-induced curvature that significantly degrades optical performance. In this work, we introduce an optical compensation method using a pitch-matched microlens array (MLA) to focus light onto just the center of each mirror. Our approach thus avoids curvature-induced artifacts and improves optical fill factor to nearly 100$\%$, independent of the original mechanical fill factor. Through simulations and experiments on a fabricated micromirror array with bowed mirrors, we show that the Pearson correlation coefficient of the imparted phase profile is improved from 0.11 to 0.85 and the brightness of a holographically-generated single spot is enhanced by 8$\times$ with our microlens array in place. Our hybrid optical-electromechanical strategy thus provides a scalable path toward high-speed, high-fidelity wavefront control for applications such as adaptive optics, holographic displays, and optogenetics.
title Correcting Fabrication-Induced Curvature in Micromirror-Based Spatial Light Modulators with a Microlens Array
topic Optics
url https://arxiv.org/abs/2511.03175